Improved Position Accuracy

Adaptive XY control uses a low frequency feedback loop to compensate for low frequency position errors introduced by phenomena such as thermal drift and creep.

The sensor signal is filtered to reject the high frequency noise and improve position accuracy.

Figure 1a shows a scanned image of calibration grating (10 μm pitch size, 100 μm scan size, 10 Hz). Figure 1b provides a digital zoom of a 5 μm region of the scan area in (a). Figure 1c shows a new scan (3.2 μm scan size, 10 Hz) at the area shown in (b).

Figure 1: A) Scan of a calibration grating. B) digital zoom of a region of the calibration grating shown in A. C) Small area scan of the calibration grating shown in A.

This shows low noise and precise positioning of the scanner. Creep is not evident.

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